JPH0288158U - - Google Patents
Info
- Publication number
- JPH0288158U JPH0288158U JP16856088U JP16856088U JPH0288158U JP H0288158 U JPH0288158 U JP H0288158U JP 16856088 U JP16856088 U JP 16856088U JP 16856088 U JP16856088 U JP 16856088U JP H0288158 U JPH0288158 U JP H0288158U
- Authority
- JP
- Japan
- Prior art keywords
- tile
- detection sensor
- defect
- inspection device
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 5
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16856088U JPH0288158U (en]) | 1988-12-26 | 1988-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16856088U JPH0288158U (en]) | 1988-12-26 | 1988-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288158U true JPH0288158U (en]) | 1990-07-12 |
Family
ID=31457844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16856088U Pending JPH0288158U (en]) | 1988-12-26 | 1988-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288158U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0577109A (ja) * | 1991-09-19 | 1993-03-30 | Fanuc Ltd | ワイヤカツト放電加工機の短絡解除方法 |
-
1988
- 1988-12-26 JP JP16856088U patent/JPH0288158U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0577109A (ja) * | 1991-09-19 | 1993-03-30 | Fanuc Ltd | ワイヤカツト放電加工機の短絡解除方法 |